A prototype of terahertz imaging system has been built in CSIRO. This imager uses a backward wave oscillator as the source and a Schottky diode as the detector. It has a bandwidth of 500-700 GHz and a source power 10 mW. The resolution at 610 GHz is about 0.85 mm. Even though this imaging system is a coherent system, only the signal power is measured at the detector and the phase information of the detected wave is lost. Some initial images of tree leaves, chocolate bars and pinholes have been acquired with this system. In this paper, we report experimental results of an attempt to improve the resolution of this imaging system beyond the limitation of diffraction (super-resolution). Due to the lack of phase information needed for applying any coherent super-resolution algorithms, the performance of the incoherent Richardson-Lucy super-resolution algorithm has been evaluated. Experimental results have demonstrated that the Richardson-Lucy algorithm can significantly improve the resolution of these images in some sample areas and produce some artifacts in other areas. These experimental results are analyzed and discussed.© (2008) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.