Surface imaging microscope

Eric W. Rogala; Isaac N. Bankman

doi:10.1117/12.764959

21 April 2008 Surface imaging microscope

Eric W. Rogala, Isaac N. Bankman

Proceedings Volume 6954, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing IX; 69540Z (2008) https://doi.org/10.1117/12.764959
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

The three-dimensional shapes of microscopic objects are becoming increasingly important for battlespace CBRNE sensing. Potential applications of microscopic 3D shape observations include characterization of biological weapon particles and manufacturing of micromechanical components. Aerosol signatures of stand-off lidar systems, using elastic backscatter or polarization, are dictated by the aerosol particle shapes and sizes that must be well characterized in the lab. A low-cost, fast instrument for 3D surface shape microscopy will be a valuable point sensor for biological particle sensing applications. Both the cost and imaging durations of traditional techniques such as confocal microscopes, atomic force microscopes, and electron scanning microscopes are too high. We investigated the feasibility of a low-cost, fast interferometric technique for imaging the 3D surface shape of microscopic objects at frame rates limited only by the camera in the system. The system operates at two laser wavelengths producing two fringe images collected simultaneously by a digital camera, and a specialized algorithm we developed reconstructs the surface map of the microscopic object. The current implementation assembled to test the concept and develop the new 3D reconstruction algorithm has 0.25 micron resolution in the x and y directions, and about 0.1 micron accuracy in the z direction, as tested on a microscopic glass test object manufactured with etching techniques. We describe the interferometric instrument, present the reconstruction algorithm, and discuss further development.

Citation Download Citation

Eric W. Rogala and Isaac N. Bankman "Surface imaging microscope", Proc. SPIE 6954, Chemical, Biological, Radiological, Nuclear, and Explosives (CBRNE) Sensing IX, 69540Z (21 April 2008); https://doi.org/10.1117/12.764959

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Microscopes

Reconstruction algorithms

Interferometry

Image filtering

Atmospheric particles

Imaging systems

Algorithm development

Show All Keywords

Keywords/Phrases

Search In:

Publication Years