The formation of laser-induced structures on the multicrystalline silicon surface has been investigated. Optimum performances of the surface structurization have been explored. A cardinal decrease in reflectance from modified surface has been discovered in a wide spectral range in comparison with the samples of chemically texturized monocrystalline silicon. The influence of subsequent chemical etching on the reflection spectra of the texturized samples surface has been analyzed.© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.