Laser treatment of the heterolayers GeO2:Ge-QDs

E. B. Gorokhov; V. A. Volodin; A. I. Kuznetsov; B. N. Chichkov; K. N. Astankova; I. A. Azarov

doi:10.1117/12.882043

7 February 2011 Laser treatment of the heterolayers GeO₂:Ge-QDs

E. B. Gorokhov, V. A. Volodin, A. I. Kuznetsov, B. N. Chichkov, K. N. Astankova, I. A. Azarov

Proceedings Volume 7994, LAT 2010: International Conference on Lasers, Applications, and Technologies; 79940W (2011) https://doi.org/10.1117/12.882043
Event: International Conference on Coherent and Nonlinear Optics (ICONO 2010) and International Conference on Lasers, Applications and Technologies (LAT 2010), 2010, Kazan, Russian Federation

Abstract

Treatments by femtosecond Ti-sapphire laser (wavelength is 800 nm, pulse duration is <30 fs) and nanosecond KrF excimer laser (wavelength is 248 nm, pulse duration is 25 ns) were performed to study the impact of laser fluence, pulse duration and energy of photons on the process of chemical and structural reconstructions in GeO_x and GeO₂:Ge heterolayers. The solid GeO_x films are metastable and decompose into two phases - Ge and GeO₂. Nanosecond KrF laser irradiation produces significant shrinkage of GeO_x films and GeO₂:Ge heterolayers caped by thin SiN_xO_y or SiO₂ films. Pulse annealing by both types of lasers stimulate as the process of nanoclusters forming and crystallization of initial amorphous Ge-nanoclusters in the GeO₂ matrix. The possibility to use the solid germanium monoxide (GeO(s)) and GeO₂:Ge heterolayers (without cap layers) as nano-resist in laser nanolithography was demonstrated. The new nanostructured material was formed - the layers of nanofoam GeO₂ which can be obtained only with application of femtosecond laser pulse treatments.

Citation Download Citation

E. B. Gorokhov, V. A. Volodin, A. I. Kuznetsov, B. N. Chichkov, K. N. Astankova, and I. A. Azarov "Laser treatment of the heterolayers GeO₂:Ge-QDs", Proc. SPIE 7994, LAT 2010: International Conference on Lasers, Applications, and Technologies, 79940W (7 February 2011); https://doi.org/10.1117/12.882043

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available