Erbium silicide nanostructures self-assembled on Si(001) by cyclic growth

Tao Ding; Junqiang Song; Juan Li; Qun Cai

doi:10.1117/12.888533

18 February 2011 Erbium silicide nanostructures self-assembled on Si(001) by cyclic growth

Tao Ding, Junqiang Song, Juan Li, Qun Cai

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79952A (2011) https://doi.org/10.1117/12.888533
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Erbium silicide nanostructures were self assembled on the Si(001) substrates by novel multiple deposition and annealing steps. In-situ scanning probe microscopy (SPM) and ex-situ scanning electron microscopy (SEM) were used to characterize the morphology of the nanostructures. Compared with traditional growth method, it was found that ErSi₂ nanostructures fabricated by cyclic growth could keep stable morphology avoiding the shape instability. Besides, both the size and distribution density could be well controlled, which have significance in the application of nanostructures.

Citation Download Citation

Tao Ding, Junqiang Song, Juan Li, and Qun Cai "Erbium silicide nanostructures self-assembled on Si(001) by cyclic growth", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952A (18 February 2011); https://doi.org/10.1117/12.888533

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