Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Fabrication and quantitative characterization of super smooth surface with sub-nanometer roughness

[+] Author Affiliations
Zhengxiang Shen, Bin Ma, Tao Ding, Xiaoqiang Wang, ZhanShan Wang

Tongji Univ. (China)

Lishuan Wang

Jinhang Institute of Technical Physics (China)

Huasong Liu, Yiqin Ji

Tongji Univ. (China) and Jinhang Institute of Technical Physics (China)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952O (February 17, 2011); doi:10.1117/12.888916
Text Size: A A A
From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

There is a growing requirement to use supersmooth surfaces with roughness in the sub-nanometer range. But, to produce 100mm-diameter optical elements with ultra-flat and supersmooth surfaces is still difficult. The fabrication technique based on continues polishing process is presented to produce flat optical element with extremely smooth surface. During the fabrication, A concept of "Process Controlling" is introduced, which means the machining of super-smooth surfaces is considered as a chain consisted of some key nodes, not merely a polishing process. The surface figure is tested using interferometer and the surface roughness is using interference microscopy and atom force microscopy (AFM) repectively. Then the Power Spectral Density (PSD) function, including the basic theory and the physical meaning, are presented to explain the difference of test results, which is measured by optical profiler and AFM with different parameters. The polynomial fitting results indicate that there is excellent agreement between measurements made by the two instruments.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Zhengxiang Shen ; Bin Ma ; Tao Ding ; Xiaoqiang Wang ; ZhanShan Wang, et al.
"Fabrication and quantitative characterization of super smooth surface with sub-nanometer roughness", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952O (February 17, 2011); doi:10.1117/12.888916; http://dx.doi.org/10.1117/12.888916


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.