Paper
18 February 2011 EUV multilayer optics for space science and ultrafast science
F. Delmotte, S. de Rossi, C. Bourassin-Bouchet, E. Meltchakov, A. Ziani, F. Choueikani, F. Bridou, A. Jérome, F. Varnière
Author Affiliations +
Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 79952Q (2011) https://doi.org/10.1117/12.888199
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China
Abstract
In this paper, we present a brief history of EUV multilayer mirrors and recent results achieved at Institut d'Optique in the fields of space science and ultra-fast pulses. Concerning space science, we present two solutions to improve reflectivity of EUV multilayer for solar imaging: three material multilayers and Al-based multilayers. Concerning attosecond pulses, we demonstrate the possibility to realize multilayer mirrors for an efficient transport of high harmonics on a broad energy band with high efficiency.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Delmotte, S. de Rossi, C. Bourassin-Bouchet, E. Meltchakov, A. Ziani, F. Choueikani, F. Bridou, A. Jérome, and F. Varnière "EUV multilayer optics for space science and ultrafast science", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952Q (18 February 2011); https://doi.org/10.1117/12.888199
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KEYWORDS
Multilayers

Extreme ultraviolet

Reflectivity

Mirrors

Thin films

Silicon

EUV optics

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