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Proceedings Article

Multilayer coatings for optics in the extreme ultraviolet

[+] Author Affiliations
Juan I. Larruquert, Manuela Vidal-Dasilva, Sergio García-Cortés, Luis Rodríguez-de Marcos, José A. Aznárez, José A. Méndez

Consejo Superior de Investigaciones Científicas (Spain)

Mónica Fernández-Perea

Consejo Superior de Investigaciones Científicas (Spain) and Lawrence Livermore National Lab. (USA)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952S (February 17, 2011); doi:10.1117/12.888463
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From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

The strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of new materials with low absorption or high reflectance. Lanthanide series was found to be a source of materials with relatively low absorption in this range, where most materials in nature present a strong absorption. Other materials, such as SiO and B, have been found to have interesting properties for applications on EUV coatings. As a result, novel multilayers based on Yb, Al, and SiO have been developed with narrowband performance in the 50-92 nm range. In some cases, the difficulty of developing narrowband coatings in the EUV can be overcome by designing multilayers that address specific purposes, such as maximizing and/or minimizing the reflectance at two or more wavelengths or bands. In this direction, we are working towards the development of coatings that combine a relatively high reflectance in a desired EUV band with a low reflectance in another band, for applications in which the presence of the latter radiation may mask a weak EUV radiation source.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Juan I. Larruquert ; Manuela Vidal-Dasilva ; Sergio García-Cortés ; Luis Rodríguez-de Marcos ; Mónica Fernández-Perea, et al.
"Multilayer coatings for optics in the extreme ultraviolet", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952S (February 17, 2011); doi:10.1117/12.888463; http://dx.doi.org/10.1117/12.888463


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