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Proceedings Article

Analysis of the measured method for scattering properties of high-reflection coating

[+] Author Affiliations
Huasong Liu

Tongji Univ. (China) and Jinhang Institute of Technical Physics (China)

Zheng Luo

Jinhang Institute of Technical Physics (China)

Zhanshan Wang

Tongji Univ. (China)

Yiqin Ji

Jinhang Institute of Technical Physics (China) and Harbin Institute of Technology (China)

Yongkai Fan, Rongwei Fan

Harbin Institute of Technology (China)

Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799529 (February 17, 2011); doi:10.1117/12.888309
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From Conference Volume 7995

  • Seventh International Conference on Thin Film Physics and Applications
  • Junhao Chu; Zhanshan Wang
  • Shanghai, China | September 24, 2010

abstract

Integral scattering is one of the important loss components of high-reflection optical thin films, so suppressing integral scattering can enhance the reflectance of high-reflection coating. Using integrating sphere is the important method of the integral scattering measurement of high reflection coatings. The paper introduced the measurement method and apparatus of integral scattering for single-wavelength at incident angle of 45deg by analyzing the principle of integrating sphere. Besides the important error sources and measurement accuracy of the integral scattering were analyzed. High-reflection coating for single wavelength onto fused silica substrate at incident angle of 45deg was manufactured by ion beam sputtering deposition and integral scattering apparatus was used to measure integral scattering of high-reflection coating. Finally by comparison of the experimental result and the value of scattering theory, we achieved the practical measurement errors origin that and established the foundation of scattering loss analysis for the ultra low losses high-reflection coating.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Huasong Liu ; Zheng Luo ; Zhanshan Wang ; Yiqin Ji ; Yongkai Fan, et al.
"Analysis of the measured method for scattering properties of high-reflection coating", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799529 (February 17, 2011); doi:10.1117/12.888309; http://dx.doi.org/10.1117/12.888309


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