Adaptive measurement of deformation and shape by compensation using TV holography and digital holography

János Kornis; Bence Béki; Richárd Séfel

doi:10.1117/12.782182

25 April 2008 Adaptive measurement of deformation and shape by compensation using TV holography and digital holography

János Kornis, Bence Béki, Richárd Séfel

Proceedings Volume 6995, Optical Micro- and Nanometrology in Microsystems Technology II; 699508 (2008) https://doi.org/10.1117/12.782182
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

In an adaptive measuring system the components of the optical arrangement may be changed automatically to adapt them to the conditions of the measurement. One mayor task of these systems is to perform automatic measurements even if the deformation is higher than the upper measuring range of the basic method. Also adaptive measuring system can help to understand what happened with the object due to the load. Digital holography and TV holography is the most promising tool for industrial applications. In our investigation adaptive methods and optical elements were developed and investigated for these techniques. Using these automatic evaluation procedures alternative output of the fringe system can be found.

Citation Download Citation

János Kornis, Bence Béki, and Richárd Séfel "Adaptive measurement of deformation and shape by compensation using TV holography and digital holography", Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 699508 (25 April 2008); https://doi.org/10.1117/12.782182

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