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Proceedings Article

Optical 3D testing of micro structures

[+] Author Affiliations
Andreas Ettemeyer

NTB Interstate Univ. of Applied Sciences of Technology (Switzerland)

Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79971S (May 26, 2011); doi:10.1117/12.891863
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From Conference Volume 7997

  • Fourth International Seminar on Modern Cutting and Measurement Engineering
  • Jiezhi Xin; Lianqing Zhu; Zhongyu Wang
  • Beijing, China | December 10, 2010

abstract

Optical measuring techniques for micro structures are limited by the numerical aperture of the objective. Within these limits different techniques can be used: white light interferometry uses an illumination source with short coherence length to determine the absolute position of the surface while confocal profilometry uses the principle of the defocus of light. As a relatively new technique, digital holography offers the simultaneous measurement of intensity and phase of a wave to generate a 3D image with the acquisition of just one single image. We give some application examples of these techniques to micro structures including deformation measurements.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Andreas Ettemeyer
"Optical 3D testing of micro structures", Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79971S (May 26, 2011); doi:10.1117/12.891863; http://dx.doi.org/10.1117/12.891863


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