Research on chromatic confocal technology for displacement measurement

Wenyi Deng; Chunhui Niu; Naiguang Lv; Xin Gao

doi:10.1117/12.888521

26 May 2011 Research on chromatic confocal technology for displacement measurement

Wenyi Deng, Chunhui Niu, Naiguang Lv, Xin Gao

Proceedings Volume 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering; 79971Z (2011) https://doi.org/10.1117/12.888521
Event: Fourth International Seminar on Modern Cutting and Measuring Engineering, 2010, Beijing, China

Abstract

The chromatic confocal method for displacement measurement is described in the paper. Some factors that affect measuring precision and measuring range are discussed, which include diameter of detector pinhole, spectrum width of light source, the chromatic dispersion of lens, the resolution of spectrum analyzer, data processing method, etc. The objective lenses with different chromatic dispersion using in the experiment system are designed and manufactured. The method processing spectrum line received from spectrometer is studied and corresponding program is compiled. The experiment system is composed of a light resource with continuum spectrum, an object lens (a multi-lens optical system), two pinholes, a beam splitter and a spectrum analyzer. The experimental systems with different lenses (different chromatic aberration) are calibrated separately to determine the relationship between the received wavelength and corresponding distance to target surface.

Citation Download Citation

Wenyi Deng, Chunhui Niu, Naiguang Lv, and Xin Gao "Research on chromatic confocal technology for displacement measurement", Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79971Z (26 May 2011); https://doi.org/10.1117/12.888521

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