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Proceedings Article

Development of the precision long-stroke 3-DOF nano-stage for the photonic crystal process

[+] Author Affiliations
Wen-Yuh Jywe, Chien-Hung Liu, Bor-Jeng Lin, Meng-Tse Lee, Jeng-Dao Lee, Yun-Feng Teng, Tung-Hsien Hsieh

National Formosa Univ. (Taiwan)

Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79972X (May 26, 2011); doi:10.1117/12.888361
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From Conference Volume 7997

  • Fourth International Seminar on Modern Cutting and Measurement Engineering
  • Jiezhi Xin; Lianqing Zhu; Zhongyu Wang
  • Beijing, China | December 10, 2010

abstract

In this paper, it develops a precision long-stroke 3-DOF nano-stage for the nano photonic crystal process. It integrates a linear motor driven long-stroke stage, a piezoelectric driven three-degrees-of-freedom (3-DOF) nano stage, multi-degrees-of-freedom (MDOF) laser interferometer measurement system and their control systems. The long-stroke nano-stage is a hybrid precision stage that can provide long-stroke and high precision positioning. The common focus horizon regulation system is used to keep the parallelism between writing instrument and the target while the laser direct writing instrument is used to write the nano structure needed. Furthermore, the automatic focusing and horizon control system can compensate the defocusing and angular errors that caused by machining automatically. With this precision 3-DOF nano-stage, the laser direct writing system can improve the process speed, overcome the optical limit of interference to reduce the writing spot, generate arbitrary patterns.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Wen-Yuh Jywe ; Chien-Hung Liu ; Bor-Jeng Lin ; Meng-Tse Lee ; Jeng-Dao Lee, et al.
"Development of the precision long-stroke 3-DOF nano-stage for the photonic crystal process", Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79972X (May 26, 2011); doi:10.1117/12.888361; http://dx.doi.org/10.1117/12.888361


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