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Proceedings Article

Fundamental aspects in machining of metals with short and ultrashort laser pulses

[+] Author Affiliations
Detlef Breitling, Andreas Ruf, Friedrich Dausinger

Univ. Stuttgart (Germany)

Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, 49 (July 15, 2004); doi:10.1117/12.541434
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From Conference Volume 5339

  • Photon Processing in Microelectronics and Photonics III
  • Peter R. Herman; Jim Fieret; Alberto Pique; Tatsuo Okada; Friedrich G. Bachmann; Willem Hoving; Kunihiko Washio; Xianfan Xu; Jan J. Dubowski; David B. Geohegan; Frank Traeger
  • San Jose, Ca | January 25, 2004

abstract

On the fast growing market of precision micro-machining of metals lasers do not only compete with other methods of structuring. There is also strong competition among different laser-processing strategies and, especially, among laser sources with different pulse duration. A comprehensive study of laser micro-machining with nanosecond, picosecond, and femtosecond laser pulses will be presented with a focus on fundamental aspects of the processes and on their practical consequences. An analysis will be given of the potential or the limitations of these laser processes with respect to their industrial application.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Detlef Breitling ; Andreas Ruf and Friedrich Dausinger
"Fundamental aspects in machining of metals with short and ultrashort laser pulses", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, 49 (July 15, 2004); doi:10.1117/12.541434; http://dx.doi.org/10.1117/12.541434


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