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Proceedings Article

Scanning Twyman interferometer for measuring small angular displacement

[+] Author Affiliations
Jianguo Ma, Yue Tong

Huainan Normal Univ. (China)

Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 799722 (May 26, 2011); doi:10.1117/12.888647
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From Conference Volume 7997

  • Fourth International Seminar on Modern Cutting and Measurement Engineering
  • Jiezhi Xin; Lianqing Zhu; Zhongyu Wang
  • Beijing, China | December 10, 2010

abstract

We present a simple but effective method for measuring small angular displacement based on a scanning Twyman interferometer ,in which, one of the two mirrors is mounted on the piezoelectric ceramic (PZT) droved by saw-tooth voltage, the status of interference fringes changes from static to dynamic. A photoelectric detector detects this dynamic photo-signal and changes into electronic signal. The signal is inputted into an oscillograph. The oscillogram will present interference crests. The method for measuring small angular displacement is based on the linear relation between the angular displacement and the crest shift on the oscillogram.

© (2010) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Jianguo Ma and Yue Tong
"Scanning Twyman interferometer for measuring small angular displacement", Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 799722 (May 26, 2011); doi:10.1117/12.888647; http://dx.doi.org/10.1117/12.888647


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