Scanning Twyman interferometer for measuring small angular displacement

Jianguo Ma; Yue Tong

doi:10.1117/12.888647

26 May 2011 Scanning Twyman interferometer for measuring small angular displacement

Jianguo Ma, Yue Tong

Proceedings Volume 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering; 799722 (2011) https://doi.org/10.1117/12.888647
Event: Fourth International Seminar on Modern Cutting and Measuring Engineering, 2010, Beijing, China

Abstract

We present a simple but effective method for measuring small angular displacement based on a scanning Twyman interferometer ,in which, one of the two mirrors is mounted on the piezoelectric ceramic (PZT) droved by saw-tooth voltage, the status of interference fringes changes from static to dynamic. A photoelectric detector detects this dynamic photo-signal and changes into electronic signal. The signal is inputted into an oscillograph. The oscillogram will present interference crests. The method for measuring small angular displacement is based on the linear relation between the angular displacement and the crest shift on the oscillogram.

Citation Download Citation

Jianguo Ma and Yue Tong "Scanning Twyman interferometer for measuring small angular displacement", Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 799722 (26 May 2011); https://doi.org/10.1117/12.888647

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