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24 January 2004 Programmable diffraction gratings and their uses in displays, spectroscopy, and communications
Stephen D. Senturia
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Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.523978
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
Microelectromechanical Systems ("MEMS") and optics are a natural match. There are several reasons: MEMS devices have dimensions and achievable actuation distances comparable to the wavelength of light; smooth-surfaced dielectrics, semiconductors, and metals can be used in various combinations; and, photons don't weigh anything, so relatively feeble MEMS actuators can easily manipulate them. Many optical MEMS devices are based on mirror arrays that can be tilted using electrostatic actuation. This paper, however, focuses on programmable diffraction gratings and their uses for projection displays, spectroscopy, and wavelength management in modern optical telecommunication systems.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Stephen D. Senturia "Programmable diffraction gratings and their uses in displays, spectroscopy, and communications", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.523978
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KEYWORDS
Microelectromechanical systems
Mirrors
Diffraction gratings
Spectroscopy
Telecommunications
Grating light valves
Spectroscopes
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