Electrical properties of DLC- (n, p)-Si heterojunctions fabricated by ion-assisted plasma-enhanced deposition and pulsed laser deposition methods

Zhosef R. Panosyan; Serjik S. Voskanyan; Yerem V. Yengibaryan; Karapet E. Avjyan; Ashot M. Khachatryan; Lenrik A. Matevosyan

doi:10.1117/12.890858

4 March 2011 Electrical properties of DLC- (n, p)-Si heterojunctions fabricated by ion-assisted plasma-enhanced deposition and pulsed laser deposition methods

Zhosef R. Panosyan, Serjik S. Voskanyan, Yerem V. Yengibaryan, Karapet E. Avjyan, Ashot M. Khachatryan, Lenrik A. Matevosyan

Author Affiliations +

Proceedings Volume 7998, International Conference on Laser Physics 2010; 799813 (2011) https://doi.org/10.1117/12.890858
Event: International Conference on Laser Physics 2010, 2010, Ashtarak, Armenia

Abstract

Electrical characteristics of DLC- (n, p)-Si heterojunctions fabricated by ion-assisted plasma-enhanced deposition and pulsed laser deposition methods were investigated. The mechanisms of carrier flow across the fabricated junctions were analyzed. Keywords: ion-assisted plasma-enhanced deposition, pulsed laser deposition, DLC- (n, p)-Si heterojunctions, currentvoltage & capacitance- voltage characteristics.

Citation Download Citation

Zhosef R. Panosyan, Serjik S. Voskanyan, Yerem V. Yengibaryan, Karapet E. Avjyan, Ashot M. Khachatryan, and Lenrik A. Matevosyan "Electrical properties of DLC- (n, p)-Si heterojunctions fabricated by ion-assisted plasma-enhanced deposition and pulsed laser deposition methods", Proc. SPIE 7998, International Conference on Laser Physics 2010, 799813 (4 March 2011); https://doi.org/10.1117/12.890858

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available