Fabrication of optical ring resonators in silicon on insulator

William Robert Headley; Graham T. Reed; Ansheng Liu; Oded Cohen; D. Hak; Mario J. Paniccia; Simon Howe; Inga Huille

doi:10.1117/12.527420

1 July 2004 Fabrication of optical ring resonators in silicon on insulator

William Robert Headley, Graham T. Reed, Ansheng Liu, Oded Cohen, D. Hak, Mario J. Paniccia, Simon Howe, Inga Huille

Proceedings Volume 5357, Optoelectronic Integration on Silicon; (2004) https://doi.org/10.1117/12.527420
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

In an effort to determine low-cost alternatives for components currently used in DWDM, optical ring resonators are currently being investigated. The well-known microfabrication techniques of silicon, coupled with the low propagation loss of single crystal silicon, make SOI an attractive material. Laterally coupled racetrack resonators utilising rib waveguides have been fabricated and preliminary results are discussed. An extinction ratio of 15.9 dB and a finesse of 11 have been measured.

Citation Download Citation

William Robert Headley, Graham T. Reed, Ansheng Liu, Oded Cohen, D. Hak, Mario J. Paniccia, Simon Howe, and Inga Huille "Fabrication of optical ring resonators in silicon on insulator", Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); https://doi.org/10.1117/12.527420

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