Integrated micro- and nano-optical biosensor silicon devices CMOS compatible

Laura M. Lechuga; Borja Sepulveda; Jose Sanchez del Rio; Francisco Blanco; Ana Calle; Carlos Dominguez

doi:10.1117/12.521104

1 July 2004 Integrated micro- and nano-optical biosensor silicon devices CMOS compatible

Laura M. Lechuga, Borja Sepulveda, Jose Sanchez del Rio, Francisco Blanco, Ana Calle, Carlos Dominguez

Proceedings Volume 5357, Optoelectronic Integration on Silicon; (2004) https://doi.org/10.1117/12.521104
Event: Integrated Optoelectronic Devices 2004, 2004, San Jose, CA, United States

Abstract

We show the design, fabrication and testing of micro/nanobiosensor devices based on optical waveguides in a highly sensitive interferometric configuration and by using evanescent wave detection. The devices are fabricated by standard Silicon CMOS microelectronics technology after a precise design for achieving a high sensitivity for biosensing applications. Two integrated Mach-Zehnder interferometric (MZI) devices, using two technologies, have been developed: (a) a MZI Microdevice based on ARROW waveguide (b) a MZI Nanodevice based on TIR waveguide. Direct biosensing with both sensors has been tested, after a specific receptor coupling to the surface device using nanometer scale immobilization techniques. Further integration of the microoptical sensors, the microfluidics, the photodetectors and the CMOS electronics will render in a lab-on-a-chip microsystem.

Citation Download Citation

Laura M. Lechuga, Borja Sepulveda, Jose Sanchez del Rio, Francisco Blanco, Ana Calle, and Carlos Dominguez "Integrated micro- and nano-optical biosensor silicon devices CMOS compatible", Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); https://doi.org/10.1117/12.521104

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