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Proceedings Article

Multiwavelength single-shot interferometry without carrier fringe introduction

[+] Author Affiliations
Katsuichi Kitagawa

Toray Engineering Co., Ltd. (Japan)

Proc. SPIE 8000, Tenth International Conference on Quality Control by Artificial Vision, 800009 (July 12, 2011); doi:10.1117/12.890302
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From Conference Volume 8000

  • Tenth International Conference on Quality Control by Artificial Vision
  • Jean-Charles Pinoli; Johan Debayle; Yann Gavet; Frédéric Gruy; Claude Lambert
  • Saint-Etienne, France | June 28, 2011

abstract

As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multi-wavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Katsuichi Kitagawa
"Multiwavelength single-shot interferometry without carrier fringe introduction", Proc. SPIE 8000, Tenth International Conference on Quality Control by Artificial Vision, 800009 (July 12, 2011); doi:10.1117/12.890302; http://dx.doi.org/10.1117/12.890302


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