Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen; David Felix; Sang-Ki Park; Paul Hauser; Brendan P. McCarthy; Dror Sarid; Christian D. Poweleit; Jose Menendez; Tom D. Milster

doi:10.1117/12.557055

9 September 2004 Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design

Tao Chen, David Felix, Sang-Ki Park, Paul Hauser, Brendan P. McCarthy, Dror Sarid, Christian D. Poweleit, Jose Menendez, Tom D. Milster

Author Affiliations +

Proceedings Volume 5380, Optical Data Storage 2004; (2004) https://doi.org/10.1117/12.557055
Event: Optical Data Storage Topical Meeting, 2004, Monterey, California, United States

Abstract

We developed a compact mechanical mount package for Solid Immersion Lens (SIL). At 600 nm wavelength illumination, the resolution of this system is 200 nm with an effective NA of 1.5.

Citation Download Citation

Tao Chen, David Felix, Sang-Ki Park, Paul Hauser, Brendan P. McCarthy, Dror Sarid, Christian D. Poweleit, Jose Menendez, and Tom D. Milster "Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design", Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); https://doi.org/10.1117/12.557055

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available