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Proceedings Article

Holographic imaging technique for characterization of MEMS switch dynamics

[+] Author Affiliations
Vytautas Ostasevicius, Arvydas Palevicius, Minvydas Ragulskis, Ramutis Palevicius

Kaunas Univ. of Technology (Lithuania)

Antanas Daugela

Hysitron, Inc. (USA)

Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 73 (July 29, 2004); doi:10.1117/12.540183
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From Conference Volume 5389

  • Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
  • Vijay K. Varadan
  • San Diego, CA | March 14, 2004

abstract

An innovative holographic imaging technique is applied in characterization of MEMS switch non-linear dynamics. The Duffing's non-linear oscillator based phenomenological model was adopted to study MEMS switch non-linear response due to the complicated contact phenomena and corresponding boundary conditions. An experimental contact measurement result of MEMS cantilever response that matches theoretical trends is provided. Non-destructive contact measurements were performed by means of quantitative nanomechnical test instruments. Non-contact holographic characterization method yielded results comparable with phenomenological model and contact measurements. The proposed holographic characterization method consists of digitized holographic measurements enhanced by the FEM eigenvector problem solution. Two cases were analyzed for simple and perturbated sinusoidal excitations that correspond to the free and contact boundary conditions, respectively.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Vytautas Ostasevicius ; Arvydas Palevicius ; Antanas Daugela ; Minvydas Ragulskis and Ramutis Palevicius
"Holographic imaging technique for characterization of MEMS switch dynamics", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 73 (July 29, 2004); doi:10.1117/12.540183; http://dx.doi.org/10.1117/12.540183


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