Chemical characteristics of negative-tone chemically amplified resist for advanced mask making

Kazumasa Takeshi; Naoko Ito; Daisuke Inokuchi; Yasushi Nishiyama; Yuichi Fukushima; Yasuhiro Okumoto

doi:10.1117/12.557692

20 August 2004 Chemical characteristics of negative-tone chemically amplified resist for advanced mask making

Kazumasa Takeshi, Naoko Ito, Daisuke Inokuchi, Yasushi Nishiyama, Yuichi Fukushima, Yasuhiro Okumoto

Proceedings Volume 5446, Photomask and Next-Generation Lithography Mask Technology XI; (2004) https://doi.org/10.1117/12.557692
Event: Photomask and Next Generation Lithography Mask Technology XI, 2004, Yokohama, Japan

Abstract

We investigated the film property and the lithographic performance of five commercialized NCARs. This report shows the relationship between chemical structure and EB lithographic performance, such as resolution, sensitivity and environmental stability. In this study, we found the good matching the matrix polymer, the cross linker and the photo acid generator(PAG) against NCARs issues. Furthermore, we could demonstrate the trade-off relation for lithographic factor and stabilized factor by chemical characteristics. This report suggests the strategy that was design of chemical structure for the next generation NCARs.

Citation Download Citation

Kazumasa Takeshi, Naoko Ito, Daisuke Inokuchi, Yasushi Nishiyama, Yuichi Fukushima, and Yasuhiro Okumoto "Chemical characteristics of negative-tone chemically amplified resist for advanced mask making", Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); https://doi.org/10.1117/12.557692

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available