Paper
4 June 2004 Microinterferometric tomography for reconstruction of 3D refractive index distribution in plane microelements
Author Affiliations +
Proceedings Volume 5477, Sixth International Conference on Correlation Optics; (2004) https://doi.org/10.1117/12.560147
Event: Sixth International Conference on Correlation Optics, 2003, Chernivsti, Ukraine
Abstract
The paper gives a review of interferometric tomography with focus on their necessary modification when applied to 3D refractive index determination in micro-objects. Specifically the influence of diffraction phenomenon and radial run-out occurring during measurement are analyzed. The analysis is confirmed by results of measurements of 3D refractive index distribution in a multimode and single mode fibers. Additionally the discussion of future work at photoelastic tomography applied for microobjects is given.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malgorzata Kujawinska and Pawel Kniazewski "Microinterferometric tomography for reconstruction of 3D refractive index distribution in plane microelements", Proc. SPIE 5477, Sixth International Conference on Correlation Optics, (4 June 2004); https://doi.org/10.1117/12.560147
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KEYWORDS
Refractive index

Tomography

Diffraction

3D metrology

Photoelasticity

Interferometry

Liquids

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