Small catadioptric microscope optics

David R. Shafer; Yung-Ho Chuang; Joseph J. Armstrong

doi:10.1117/12.561002

14 October 2004 Small catadioptric microscope optics

David R. Shafer, Yung-Ho Chuang, Joseph J. Armstrong

Proceedings Volume 5523, Current Developments in Lens Design and Optical Engineering V; (2004) https://doi.org/10.1117/12.561002
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

New catadioptric objectives have been developed with large bandwidths in the DUV, high numerical apertures (NAs), and small size. This can be achieved using a single glass material. Designs are specifically optimized for loose alignment tolerances and ease of manufacturability. Applications include broad band DUV imaging and high resolution immersion imaging for industrial microscopy and life sciences.

Citation Download Citation

David R. Shafer, Yung-Ho Chuang, and Joseph J. Armstrong "Small catadioptric microscope optics", Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, (14 October 2004); https://doi.org/10.1117/12.561002

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