New catadioptric objectives have been developed with large bandwidths in the DUV, high numerical apertures (NAs), and small size. This can be achieved using a single glass material. Designs are specifically optimized for loose alignment tolerances and ease of manufacturability. Applications include broad band DUV imaging and high resolution immersion imaging for industrial microscopy and life sciences.© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.