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Proceedings Article

Small catadioptric microscope optics

[+] Author Affiliations
David R. Shafer

David Shafer Optical Design (USA)

Yung-Ho Chuang, Joseph J. Armstrong

KLA-Tencor Corp. (USA)

Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, 12 (October 14, 2004); doi:10.1117/12.561002
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From Conference Volume 5523

  • Current Developments in Lens Design and Optical Engineering V
  • Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson
  • Denver, CO | August 02, 2004

abstract

New catadioptric objectives have been developed with large bandwidths in the DUV, high numerical apertures (NAs), and small size. This can be achieved using a single glass material. Designs are specifically optimized for loose alignment tolerances and ease of manufacturability. Applications include broad band DUV imaging and high resolution immersion imaging for industrial microscopy and life sciences.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

David R. Shafer ; Yung-Ho Chuang and Joseph J. Armstrong
"Small catadioptric microscope optics", Proc. SPIE 5523, Current Developments in Lens Design and Optical Engineering V, 12 (October 14, 2004); doi:10.1117/12.561002; http://dx.doi.org/10.1117/12.561002


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