Aberration characterization using frequency domain analysis of low-coherence interferograms

Xavier Colonna de Lega

doi:10.1117/12.559843

2 August 2004 Aberration characterization using frequency domain analysis of low-coherence interferograms

Xavier Colonna de Lega

Proceedings Volume 5531, Interferometry XII: Techniques and Analysis; (2004) https://doi.org/10.1117/12.559843
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The processing of low-coherence interferometric signals in the frequency domain generates multiple images of an object surface, each image corresponding to a distinct wavelength or illumination angle. The detection of the motion of object features between images provides a direct measure of the net effect of chromatic and some geometric imaging aberrations. The data are presented as vector plots showing the motion of the centroid of imaging ray bundles as a function of wavelength or illumination angle, and as a function of field position. The correlation technique developed for this application resolves feature motions smaller than the optical resolution of the imaging system. The approach is applied to the characterization of high and low numerical aperture interference microscope objectives. The information can be used to minimize misalignments of an interferometer, compare the performance of lenses and offer objective means of assessing the potential lateral resolution of an instrument.

Citation Download Citation

Xavier Colonna de Lega "Aberration characterization using frequency domain analysis of low-coherence interferograms", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); https://doi.org/10.1117/12.559843

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