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Proceedings Article

An improved illumination system for spatial coherence control

[+] Author Affiliations
Zhiqiang Liu, Takeshi Gemma

Nikon Corp. (Japan)

Joseph Rosen

Ben-Gurion Univ. of the Negev (Israel)

Mitsuo Takeda

Univ. of Electro-Communications (Japan)

Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, 220 (August 2, 2004); doi:10.1117/12.560350
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From Conference Volume 5531

  • Interferometry XII: Techniques and Analysis
  • Katherine Creath; Joanna Schmit
  • Denver, CO | August 02, 2004

abstract

A longitude coherence control system needs a source that is temporally coherent and yet spatially incoherent. For this reason, a zone plate-like pattern is imaged onto a rotating ground glass. Generally the ground glass exhibits a strong directivity. It is far from an ideal uniform diffuser that is implicitly assumed in the theory. To solve this problem, we propose a new illumination system. In our system, the beam illuminating the zone plate-like pattern is focused on the test surface. We measured the longitudinal coherence functions in our optical system. The result shows that the longitude coherent function is better controlled in our interferometer.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Zhiqiang Liu ; Takeshi Gemma ; Joseph Rosen and Mitsuo Takeda
"An improved illumination system for spatial coherence control", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, 220 (August 2, 2004); doi:10.1117/12.560350; http://dx.doi.org/10.1117/12.560350


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