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Proceedings Article

A white-light profiling algorithm adopting the multiwavelength interferometric technique

[+] Author Affiliations
Hua-Chen Hsu, Chi-Hong Tung, Ching-Fen Kao, Calvin C. Chang

Industrial Technology Research Institute (Taiwan)

Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, 244 (August 2, 2004); doi:10.1117/12.559251
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From Conference Volume 5531

  • Interferometry XII: Techniques and Analysis
  • Katherine Creath; Joanna Schmit
  • Denver, CO | August 02, 2004

abstract

A new profiling algorithm is proposed for the scanning white-light interferometry. A series of white-light interferograms are acquired by traditional vertical scanning process. The collected intensity data of the interferograms are then Fourier-Transformed with respect to the ordinate, or the scanning axis, into the wave number domain, where two or more wave numbers are selected for further calculation. The multi-wavelength phase-unwrapping technique is then used to solve for the surface profile. Preliminary experiment has been carried out with a Mirau-type white-light interferometer on two sets of step-height standards. The proposed algorithm works as well even when the spectrum of the white-light source is not Gaussian distributed, while the conventional peak sensing algorithms do not.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Hua-Chen Hsu ; Chi-Hong Tung ; Ching-Fen Kao and Calvin C. Chang
"A white-light profiling algorithm adopting the multiwavelength interferometric technique", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, 244 (August 2, 2004); doi:10.1117/12.559251; http://dx.doi.org/10.1117/12.559251


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