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Proceedings Article

Moire interferometry formulas for hard x-ray wavefront sensing

[+] Author Affiliations
Timm Weitkamp, A. Diaz, Bernd Nohammer, Eric Ziegler, Christian David

Paul Scherrer Institut (Switzerland)

Franz Pfeiffer, Marco Stampanoni

European Synchrotron Radiation Facility (France)

Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, 140 (October 18, 2004); doi:10.1117/12.559695
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From Conference Volume 5533

  • Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
  • Ali M. Khounsary; Udo Dinger; Kazuya Ota
  • Denver, CO | August 02, 2004

abstract

We derive mathematical relations for hard X-ray moire wavefront analysis with a grating interferometer. In particular, the first derivative of the wavefront phase profile and the local radius of curvature of the wavefront are related to the position and inclination of the observed moir‰ fringes.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Timm Weitkamp ; A. Diaz ; Bernd Nohammer ; Franz Pfeiffer ; Marco Stampanoni, et al.
"Moire interferometry formulas for hard x-ray wavefront sensing", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, 140 (October 18, 2004); doi:10.1117/12.559695; http://dx.doi.org/10.1117/12.559695


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