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Proceedings Article

Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement

[+] Author Affiliations
Satoshi Matsuyama, Hidekazu Mimura, Kazuya Yamamura, Hirokatsu Yumoto, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Kazuto Yamauchi

Osaka Univ. (Japan)

Makina Yabashi

Japan Synchorotron Radiation Research Institute (Japan)

Kenji Tamasaku, Yoshinori Nishino

RIKEN-The Institute of Physical and Chemical Research (Japan)

Tetsuya Ishikawa

Japan Synchorotron Radiation Research Institute (Japan) and RIKEN-The Institute of Physical and Chemical Research (Japan)

Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, 181 (October 18, 2004); doi:10.1117/12.567515
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From Conference Volume 5533

  • Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
  • Ali M. Khounsary; Udo Dinger; Kazuya Ota
  • Denver, CO | August 02, 2004

abstract

The spatial resolution of the scanning X-ray microscopy apparently depends on the beam size of the focused X-ray. Recently, highly accurate elliptical mirrors were reported to be fabricated, and nearly diffraction-limited line focusing was achieved. In this study, to realize diffraction-limited and 2-dimentional focusing with such highly accurate mirrors, accuracies to be realized in mirror alignings, for example, adjusting the glancing angle and the in-plane rotation, were estimated by employing two types of simulators. They are appropriately based on geometrical or wave-optical theories. They are alternatively employed according to the degree of accuracy required in the mirror alignment. A focusing unit with the adjusting mechanism fulfilling the required alignment accuracies was constructed, and the relationships between the alignment errors and focused beam profiles were quantitatively examined at the 1km-long beamline (BL29XUL) of SPring-8. Obtained results were in good agreement with the calculated results. Additionally, the alignment accuracy to be realized in the K-B unit equipping mirrors of larger NA (numerical aperture) was calculated to realize sufficient performances in focusing.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Satoshi Matsuyama ; Hidekazu Mimura ; Kazuya Yamamura ; Hirokatsu Yumoto ; Yasuhisa Sano, et al.
"Wave-optical and ray-tracing analysis to establish a compact two-dimensional focusing unit using K-B mirror arrangement", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, 181 (October 18, 2004); doi:10.1117/12.567515; http://dx.doi.org/10.1117/12.567515


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