The evolution of hard x-ray tomography from the micrometer to the nanometer length scale

Christoph Rau; K. M. Peterson; P. R. Jemian; T. Terry; Michael T. Harris; Stefan Vogt; C.-P. Richter; U. Neuhausler; G. Schneider; Ian K. Robinson

doi:10.1117/12.559887

26 October 2004 The evolution of hard x-ray tomography from the micrometer to the nanometer length scale

Christoph Rau, K. M. Peterson, P. R. Jemian, T. Terry, Michael T. Harris, Stefan Vogt, C.-P. Richter, U. Neuhausler, G. Schneider, Ian K. Robinson

Author Affiliations +

Proceedings Volume 5535, Developments in X-Ray Tomography IV; (2004) https://doi.org/10.1117/12.559887
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

For several years efforts have been made to improve the resolution for imaging and tomography with hard X-rays. Recently we demonstrated sub-100 nm resolution at 13 keV with a microscope including a Kirkpatrick-Baez multilayer-mirror (KB) as a condenser followed by a micro-Fresnel Zone Plate (FZP) as an objective lens. We built since a new tomography station at UNICAT at the Advanced Photon Source integrating the KB-FZP microscope for 100 nm tomography.

Citation Download Citation

Christoph Rau, K. M. Peterson, P. R. Jemian, T. Terry, Michael T. Harris, Stefan Vogt, C.-P. Richter, U. Neuhausler, G. Schneider, and Ian K. Robinson "The evolution of hard x-ray tomography from the micrometer to the nanometer length scale", Proc. SPIE 5535, Developments in X-Ray Tomography IV, (26 October 2004); https://doi.org/10.1117/12.559887

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available