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Proceedings Article

Submicron focusing of high-energy x-rays with Ni refractive lenses

[+] Author Affiliations
Anatoly A. Snigirev, Irina I. Snigireva, Marco Di Michiel, Veijo Honkimaki

European Synchrotron Radiation Facility (France)

Maxim V. Grigoriev

Institute of Microelectronics Technology (Russia)

Vladimir P. Nazmov, Volker Saile

Forschungszentrum Karlsruhe GmbH (Germany) and Univ. of Karlsruhe (Germany)

Elena F. Reznikova, Jurgen Mohr

Forschungszentrum Karlsruhe GmbH (Germany)

Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, 244 (November 4, 2004); doi:10.1117/12.564545
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From Conference Volume 5539

  • Design and Microfabrication of Novel X-Ray Optics II
  • Anatoly A. Snigirev; Derrick C. Mancini
  • Denver, CO | August 02, 2004

abstract

We report the results on experimental study of optical properties of Ni refractive lenses made by deep X-ray lithography and LIGA techniques. One- and two-dimensional lenses were tested at the ESRF ID15 beamline using wide energy spectrum from 40 keV to 220 keV. The focusing properties in terms of focal length, size of the focal spot/line and gain were studied. Sub micrometer focusing was measured in the energy range from 40 to 150 keV. The measured lens parameters were compared with ray-tracing analysis.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Anatoly A. Snigirev ; Irina I. Snigireva ; Marco Di Michiel ; Veijo Honkimaki ; Maxim V. Grigoriev, et al.
"Submicron focusing of high-energy x-rays with Ni refractive lenses", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, 244 (November 4, 2004); doi:10.1117/12.564545; http://dx.doi.org/10.1117/12.564545


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