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Proceedings Article

Addressing large arrays of electrostatic actuators for adaptive optics applications

[+] Author Affiliations
Jeremy R. Hui, Xingtao Wu

Optron Systems, Inc. (USA)

Cardinal Warde

Massachusetts Institute of Technology (USA)

Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, 17 (October 12, 2004); doi:10.1117/12.563892
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From Conference Volume 5553

  • Advanced Wavefront Control: Methods, Devices, and Applications II
  • John D. Gonglewski; Mark T. Gruneisen; Michael K. Giles
  • Denver, CO | August 02, 2004

abstract

As the spatial resolution, stroke and speed requirements for advanced adaptive optics applications increase, the addressing of large numbers of electrostatic actuators for wavefront correction becomes more demanding. In this paper, we review the requirements, limits and the challenges of electrically addressing a large array of electrostatic actuators using an integrated CMOS technology. We also review the issues of high-rate data sourcing, signal channelization and multiplexing, and electronics integration (VLSI) with an eye on system power and size requirements. In examining the various CMOS technologies, we find that a broadly applicable 40V technology is currently available. Higher voltages are also available, albeit with additional design restrictions. Finally, we report preliminary work on a specific addressing scheme for a vertically-integrated VLSI/electrostatic MEMS prototype spatial phase modulator with 288x256 pixels at framing rates of 2kHz.

© (2004) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Jeremy R. Hui ; Xingtao Wu and Cardinal Warde
"Addressing large arrays of electrostatic actuators for adaptive optics applications", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, 17 (October 12, 2004); doi:10.1117/12.563892; http://dx.doi.org/10.1117/12.563892


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