Micro-optical instrumentation for process spectroscopy

Richard A. Crocombe; Dale C. Flanders; Walid Atia

doi:10.1117/12.578107

8 December 2004 Micro-optical instrumentation for process spectroscopy

Richard A. Crocombe, Dale C. Flanders, Walid Atia

Proceedings Volume 5591, Lab-on-a-Chip: Platforms, Devices, and Applications; (2004) https://doi.org/10.1117/12.578107
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

Traditional laboratory ultraviolet/visible/near-infrared spectroscopy instruments are tabletop-sized pieces of equipment that exhibit very high performance, but are generally too large and costly to be widely distributed for process control applications or used as spectroscopic sensors. Utilizing a unique, and proven, micro-optical technology platform origi-nally developed, qualified and deployed in the telecommunications industry, we have developed a new class of spectro-scopic micro-instrumentation that has laboratory quality resolution and spectral range, with superior speed and robust-ness. The fundamentally lower cost and small form factor of the technology will enable widespread use in process moni-toring and control. This disruption in the ground rules of spectroscopic analysis in these processes is enabled by the re-placement of large optics and detector arrays with a high-finesse, high-speed micro electro mechanical system (MEMS) tunable filter and a single detector, that enable the manufacture of a high performance and extremely rugged spectrome-ter in the footprint of a credit card. Specific process monitoring and control applications discussed in the paper include pharmaceutical, gas sensing and chemical processing applications.

Citation Download Citation

Richard A. Crocombe, Dale C. Flanders, and Walid Atia "Micro-optical instrumentation for process spectroscopy", Proc. SPIE 5591, Lab-on-a-Chip: Platforms, Devices, and Applications, (8 December 2004); https://doi.org/10.1117/12.578107

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