F2 laser ablation of silicone rubber

Hiromitsu Takao; Masayuki Okoshi; Narumi Inoue

doi:10.1117/12.596303

8 October 2004 F₂ laser ablation of silicone rubber

Hiromitsu Takao, Masayuki Okoshi, Narumi Inoue

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596303
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

The ablation of silicone rubber (polydimethysiloxane, [SiO(CH₃)₂]_n) by 157-nm F₂ laser irradiation has been studied. The ablation threshold fluence (F_th) was approximately 140 mJ/cm². The irradiated surface swelled and was modified to SiO₂ for laser fluences below F_th. No carbon contamination was observed in the SiO₂. Above F_th, the surface of etched silicone rubber was structurally well defined and precisely patterned. The chemical composition of the etched surface demonstrated little change. When the silicone rubber was irradiated at laser fluences of nearly F_th, conical structures were formed on the surface. It is supposed that residual carbon photodissociated by laser irradiation initiated cone formation by locally shifting F_th to a higher value. In situ mass spectrometric analysis of gaseous products evolved during F₂ laser irradiation of silicone rubber showed that CH₃ and CH₄ components dominated for laser fluences below F_th, and CO component dominated for laser fluences above F_th. The high photon energy (7.9 eV) of an F₂ laser could photodissociate preferentially weak bonds (Si-C) of silicone for lower laser fluence and almost all bonds (Si-C, C-H, Si-O) of silicone for higher laser fluence.

Citation Download Citation

Hiromitsu Takao, Masayuki Okoshi, and Narumi Inoue "F₂ laser ablation of silicone rubber", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596303

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available