Nanoscale modification of DLC film surfaces with femtosecond laser pulses

Naoki Yasumaru; Kenzo Miyazaki; Junsuke Kiuchi; Hiroyuki Magara

doi:10.1117/12.596776

8 October 2004 Nanoscale modification of DLC film surfaces with femtosecond laser pulses

Naoki Yasumaru, Kenzo Miyazaki, Junsuke Kiuchi, Hiroyuki Magara

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596776
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Surface modification of thin diamond-like carbon (DLC) films deposited on stainless steel has been studied by irradiating linearly and circularly polarized femtosecond (fs), 800- and 267-nm Ti:sapphire laser pulses at laser fluence around the ablation threshold. The morphology of the DLC surfaces was observed and characterized with a field-emission scanning electron microscope and a scanning probe microscope. The linearly polarized light produced arrays of fine slender granular structure on the ablated surface, while the circularly polarized light formed a fine dot-like periodic structure. The mean spacing of these fine structures was 1/10 - 1/5 of the laser wavelength used. With an increase in the laser fluence, the size of structure was observed to increase, while the surface roughness decreased. We have analyzed the modified DLC surfaces by observing Raman spectra and found that the nanoscale modification of the DLC films is accompanied with a structural change into glassy carbon. This structural change depended on the fs laser fluence and little on the laser polarization and wavelength.

Citation Download Citation

Naoki Yasumaru, Kenzo Miyazaki, Junsuke Kiuchi, and Hiroyuki Magara "Nanoscale modification of DLC film surfaces with femtosecond laser pulses", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596776

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