Etching three-dimensional photonic crystals in GaAs

Janusz A. Murakowski; Chris Schuetz; Garrett J. Schneider; Dennis W. Prather

doi:10.1117/12.591282

22 January 2005 Etching three-dimensional photonic crystals in GaAs

Janusz A. Murakowski, Chris Schuetz, Garrett J. Schneider, Dennis W. Prather

Proceedings Volume 5720, Micromachining Technology for Micro-Optics and Nano-Optics III; (2005) https://doi.org/10.1117/12.591282
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

We present an efficient method for the fabrication of three-dimensional photonic crystals in GaAs-based materials. The method exploits the dependence of the oxidation rate of AlGaAs on the aluminum content in the alloy. As a result, a wide range of oxidation profiles is possible. The oxidation profiles are determined by the Al concentration profiles in a GaAs/AlGaAs stack grown by molecular beam epitaxy, and the resulting three-dimensional structure depends on the initial two-dimensional pattern defined by standard lithography. We detail the process and present preliminary results showing the viability of the method to realize three-dimensional photonic crystals of various geometries.

Citation Download Citation

Janusz A. Murakowski, Chris Schuetz, Garrett J. Schneider, and Dennis W. Prather "Etching three-dimensional photonic crystals in GaAs", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); https://doi.org/10.1117/12.591282

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available