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Proceedings Article

High-Q microring resonator for biochemical sensors

[+] Author Affiliations
Junpeng Guo, Michael J. Shaw, G. A. Vawter, G. R. Hadley, Peter Esherick, Charles T. Sullivan

Sandia National Labs. (USA)

Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, 83 (April 11, 2005); doi:10.1117/12.589467
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From Conference Volume 5728

  • Integrated Optics: Devices, Materials, and Technologies IX
  • Yakov Sidorin; Christoph A. Waechter
  • San Jose, California, United States | January 22, 2005

abstract

The large refractive index difference between silicon nitride and silicon dioxide allows silicon nitride/dioxide waveguides to have a small mode size and low radiation bending loss. Low radiation bending loss enables high quality (Q) factor microring resonators. In this paper, we will present a record high quality factor microring resonator using silicon nitride and silicon dioxide on a silicon wafer. The microring resonator was fabricated using a deep UV photolithography and etching process. The microring resonator was critically coupled to a straight waveguide. An intrinsic quality factor of 240,000 has been measured. We will also present our result of using on-chip high-Q microring resonators for liquid phase chemical sensing application.

© (2005) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Junpeng Guo ; Michael J. Shaw ; G. A. Vawter ; G. R. Hadley ; Peter Esherick, et al.
"High-Q microring resonator for biochemical sensors", Proc. SPIE 5728, Integrated Optics: Devices, Materials, and Technologies IX, 83 (April 11, 2005); doi:10.1117/12.589467; http://dx.doi.org/10.1117/12.589467


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