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Proceedings Article

On-chip silicon-based waveguide with light guiding in low-index core materials

[+] Author Affiliations
Yasha Yi, Peter Bermel, Shoji Akiyama, Xiaoman Duan, Lionel C. Kimerling

Massachusetts Institute of Technology (USA)

Proc. SPIE 5730, Optoelectronic Integration on Silicon II, 181 (March 14, 2005); doi:10.1117/12.589911
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From Conference Volume 5730

  • Optoelectronic Integration on Silicon II
  • Joel A. Kubby; Ghassan E. Jabbour
  • San Jose, California, United States | January 22, 2005

abstract

A new on-chip silicon-based Bragg cladding waveguide with full CMOS compatibility is developed. This novel optical waveguide has a low refractive index core (SiO2) surrounded by a 1D photonic crystal cladding. The cladding consists of several dielectric bilayers, where each bilayer consists of a high index-contrast pair of layers of Si and Si3N4. This new waveguide guides light based on omnidirectional reflection, reflecting light at any angle or polarization back into the core. Its fabrication is fully compatible with current microelectronics processes. In principle, a core of any low-index material can be realized with our novel structure, including air. Potential applications include tight turning radii, high power transmission, nonlinear properties engineering and biomaterials sensors on silicon chip.

© (2005) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Yasha Yi ; Peter Bermel ; Shoji Akiyama ; Xiaoman Duan and Lionel C. Kimerling
"On-chip silicon-based waveguide with light guiding in low-index core materials", Proc. SPIE 5730, Optoelectronic Integration on Silicon II, 181 (March 14, 2005); doi:10.1117/12.589911; http://dx.doi.org/10.1117/12.589911


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