Fabrication of nanometer sized features on non-flat substrates using a nano-imprint lithography process

Mike Miller; Gary Doyle; Nick Stacey; Frank Xu; S. V. Sreenivasan; Mike Watts; Dwayne L. LaBrake

doi:10.1117/12.607340

6 May 2005 Fabrication of nanometer sized features on non-flat substrates using a nano-imprint lithography process

Mike Miller, Gary Doyle, Nick Stacey, Frank Xu, S. V. Sreenivasan, Mike Watts, Dwayne L. LaBrake

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.607340
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

The Step and Flash Imprint Lithography (S-FILTM) process is a step and repeat nano-imprint lithography (NIL) technique based on UV curable low viscosity liquids. Generally nano-imprint lithography (NIL) is a negative acting process which makes an exact replica of the imprint mold and is subsequently dry developed to reveal the underlying substrate material. The authors have demonstrated a novel imprint process, which reverses the tone of the imprint and enables dry develop on nonflat wafers with good critical dimension control and resist layer thickness. This positive acting NIL process termed SFIL/RTM (reverse tone S-FIL), enables nano-imprinting over intrinsic substrate topology of the type commonly found on single side polished substrates. This paper describes the SFIL/R process and the results of pattern transfer on single side polished silicon wafers.

Citation Download Citation

Mike Miller, Gary Doyle, Nick Stacey, Frank Xu, S. V. Sreenivasan, Mike Watts, and Dwayne L. LaBrake "Fabrication of nanometer sized features on non-flat substrates using a nano-imprint lithography process", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.607340

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available