Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

B. C. Park; K. Y. Jung; J. Hong; W. Y. Song; B.-h. O; J. A. Kim

doi:10.1117/12.599245

10 May 2005 Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

B. C. Park, K. Y. Jung, J. Hong, W. Y. Song, B.-h. O, J. A. Kim

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.599245
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Precision carbon nanotube (P-CNT) tip for atomic force microscope (AFM) was fabricated where CNT orientation and length is controlled within the precision of 1 degree and 300 nm, respectively. The orientation, diameter and length of CNT tip are crucial factors for faithful profiling of surface patterns. With a nano-manipulation while viewing scanning electron microscope live image followed by focused ion beam process, P-CNT tip could be made. P-CNT tip acts as a normal CNT tip without FIB process. Further it maintains the elasticity. P-CNT tip can, in principle, enter the trench or hole less than 70 nm, which is impossible with the current state-of-the-art silicon tip for CD-AFM. Flaring the CNT end would potentially make possible the AFM-based sub-70 nm CD metrology for these structures.

Citation Download Citation

B. C. Park, K. Y. Jung, J. Hong, W. Y. Song, B.-h. O, and J. A. Kim "Precision carbon nanotube tip for critical dimension measurement with atomic force microscope", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.599245

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