Critical dimension uniformity control with combined ellipsometry and reflectometry

Jon Opsal; Jingmin Leng; Xuelong Cao

doi:10.1117/12.600124

10 May 2005 Critical dimension uniformity control with combined ellipsometry and reflectometry

Jon Opsal, Jingmin Leng, Xuelong Cao

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.600124
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

In the 90nm node and beyond, Critical Dimension Uniformity (CDU) control is essential for today's high performance IC devices. The desired control of CDU is just under 2nm (3 sigma) across a 300mm wafer with 577 die. In this study we used an Opti-Probe 7341 RT/CD system that combines broadband (190-840 nm) spectroscopic ellipsometry (SE), spectroscopic reflectometry (BB), single wavelength (673 nm) beam profile reflectometry (BPR) and single wavelength (633nm) absolute ellipsometry (AE). All of the above technologies were used to characterize the optical dispersions of the individual films in the stack of interest, resist/barc/sion/poly/oxide/silicon. We then used these dispersion results and the SE and BB technologies to characterize the CDU of the patterned wafer. With the SE technology we measured CDU's in the range of 1.9-2.0 nm compared with BB measured CDU's in the range of 4-5 nm, both SE and BB wavelength were in the range of 240 nm-780 nm. However, if the wavelength range of SE and BB were extended to 190nm-840 nm, the CDU with SE stayed at the same level while that of BB reduced a factor of 2 to about 2.0-2.5 nm.

Citation Download Citation

Jon Opsal, Jingmin Leng, and Xuelong Cao "Critical dimension uniformity control with combined ellipsometry and reflectometry", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.600124

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available