High refractive index immersion fluids for 193 nm immersion lithography

Bridgette Budhlall; Gene Parris; Peng Zhang; Xiaoping Gao; Zarka Zarkov; Brenda Ross; Simon Kaplan; John Burnett

doi:10.1117/12.600025

12 May 2005 High refractive index immersion fluids for 193 nm immersion lithography

Bridgette Budhlall, Gene Parris, Peng Zhang, Xiaoping Gao, Zarka Zarkov, Brenda Ross, Simon Kaplan, John Burnett

Proceedings Volume 5754, Optical Microlithography XVIII; (2005) https://doi.org/10.1117/12.600025
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

For the next-generation immersion lithography technology, there is a growing interest in the immersion fluids having a refractive index larger than 1.5 and low absorbance at 193nm wavelength. In this paper, we report our effort in identifying new immersion fluid candidates. The absolute refractive index values and thermo-optic coefficients, dn/dT, were measured with 1x10^-4 and 1x10^-5 accuracy respectively at 193nm wavelength. The results showed promising candidates having refractive index ranging from 1.5 to 1.65 with low absorbance at 193nm wavelength. Preliminary imaging results with a new immersion fluid gave good 65nm Line/Space patterns. However, the minimum exposure time of 20sec is about ten times as needed for water, indicating the need to further reduce the absorbance of the immersion fluid.

Citation Download Citation

Bridgette Budhlall, Gene Parris, Peng Zhang, Xiaoping Gao, Zarka Zarkov, Brenda Ross, Simon Kaplan, and John Burnett "High refractive index immersion fluids for 193 nm immersion lithography", Proc. SPIE 5754, Optical Microlithography XVIII, (12 May 2005); https://doi.org/10.1117/12.600025

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available