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Proceedings Article

Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride

[+] Author Affiliations
Julie L. Ladison, James J. Price, John D. Helfinstine, William R. Rosch

Corning Inc. (USA)

Proc. SPIE 5754, Optical Microlithography XVIII, 1329 (May 12, 2005); doi:10.1117/12.601033
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From Conference Volume 5754

  • Optical Microlithography XVIII
  • Bruce W. Smith
  • San Jose, CA | February 27, 2005

abstract

Knoop and Vickers hardness, Young's Modulus, and fracture toughness measurements were performed on Corning's Code 9575 calcium fluoride in various orientations. Other commercially available sources of calcium fluoride were also measured for comparison of properties. Knoop hardness and elastic properties exhibited a dependence on orientation while no such dependence was observed for Vickers hardness and fracture toughness. The results also indicated that these physical properties were not dependent on the source of the material

© (2005) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Topics

Calcium
Citation

Julie L. Ladison ; James J. Price ; John D. Helfinstine and William R. Rosch
"Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride", Proc. SPIE 5754, Optical Microlithography XVIII, 1329 (May 12, 2005); doi:10.1117/12.601033; http://dx.doi.org/10.1117/12.601033


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