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Proceedings Article

The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures

[+] Author Affiliations
Hyun J. In, William J. Arora, Paul Stellman, Sundeep Kumar, Shao-Horn Yang, Henry I. Smith, George Barbastathis

Massachusetts Institute of Technology (USA)

Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 84 (May 20, 2005); doi:10.1117/12.600304
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From Conference Volume 5763

  • Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
  • Vijay K. Varadan
  • San Diego, CA | March 06, 2005

abstract

Nanostructured Origami 3D Fabrication and Assembly Process is a method of manufacturing 3D nanostructured devices using exclusively 2D micro- and nanofabrication techniques. The origami approach consists of first patterning a large 2D membrane and then folding the membrane along predefined regions to obtain the final 3D configuration. We report on the materials, actuation, and modeling aspects of building an origami structure. Experimental results from fabricated devices as well as future applications of the technique are also presented.

© (2005) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Hyun J. In ; William J. Arora ; Paul Stellman ; Sundeep Kumar ; Shao-Horn Yang, et al.
"The nanostructured Origami 3D fabrication and assembly process for nanopatterned 3D structures", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 84 (May 20, 2005); doi:10.1117/12.600304; http://dx.doi.org/10.1117/12.600304


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