Hierarchical MEMS synthesis and optimization

Ying Zhang; Raffi Kamalian; Alice M. Agogino; Carlo H. Sequin

doi:10.1117/12.600376

16 May 2005 Hierarchical MEMS synthesis and optimization

Ying Zhang, Raffi Kamalian, Alice M. Agogino, Carlo H. Sequin

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.600376
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

A hierarchical MEMS synthesis and optimization architecture has been developed for MEMS design automation. The architecture integrates an object-oriented component library with a MEMS simulation tool and two levels of optimization: global genetic algorithms and local gradient-based refinement. An object-oriented data structure is used to represent hierarchical levels of elements in the design library and their connectivity. Additionally, all elements encapsulate instructions and restrictions for the genetic operations of mutation and crossover. The parameterized component library includes distinct low-level primitive elements and high-level clusters of primitive elements. Surface micro-machined suspended resonators are used as an example to introduce the hierarchical MEMS synthesis and optimization process.

Citation Download Citation

Ying Zhang, Raffi Kamalian, Alice M. Agogino, and Carlo H. Sequin "Hierarchical MEMS synthesis and optimization", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.600376

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available