Paper
8 December 2004 Optical properties of BaTiO3 and Mn:BaTiO3 thin films deposited on fused quartz and silicon substrates using a sol-gel method
Yawei Li, Jing-Lan Sun, Xiangjian Meng, Weifeng Zhang, Jun-Hao Chu
Author Affiliations +
Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607556
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China
Abstract
The BaTiO3 and Mn:BaTiO3 thin films were fabricated on fused quartz and Si(111) substrates by a sol-gel method. The crystal structures of the samples were characterized by x-ray diffraction. It is shown that the samples are both polycrystalline thin films and possess cubic structure. The Mn-doping has no obvious effect on the crystal structure. The optical properties of the thin films were studied by transmitted spectrum technique or by spectroscopic ellipsometry depending on the substrate used. The transmitted spectrum shows that the absorption edge of the Mn-doping films has red shift compared with the undoping films. The energy gaps calculated from the transmitted spectrum are 3.68 and 3.39eV for undoping and Mn-doping samples, respectively. The results of spectroscopic ellipsometry shows that the refractive index of the Mn:BaTiO3 thin film is bigger than that of the BaTiO3 thin film. Which the change of energy gap and refractive index caused by Mn-doping can be explained by the Sellmeier Oscillator model.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yawei Li, Jing-Lan Sun, Xiangjian Meng, Weifeng Zhang, and Jun-Hao Chu "Optical properties of BaTiO3 and Mn:BaTiO3 thin films deposited on fused quartz and silicon substrates using a sol-gel method", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607556
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KEYWORDS
Thin films

Fused quartz

Refractive index

Sol-gels

Optical properties

Manganese

Absorption

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