Anisotropic optical properties of ZrO2 films by oblique deposition

Jianguo Wang; Jianda Shao; Shuhai Fan; Zhengxiu Fan

doi:10.1117/12.607372

8 December 2004 Anisotropic optical properties of ZrO₂ films by oblique deposition

Jianguo Wang, Jianda Shao, Shuhai Fan, Zhengxiu Fan

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607372
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

The ZrO₂ thin films are prepared by oblique deposition. Spectrophotometry yields an obvious anisotropic p-polarized transmittance. On the computation of refractive indices of different incidence angles and polarization states, the anisotropic optical properties are obtained. The refractive indices derived from s-polarized light are around 1.725, but the ones for p-polarized light are from 1.82 to 1.94. The distribution of refractive indices is consistent with the transmittance of s- and p-polarized light. The transmittance of ZrO₂ thin films by oblique and normal deposition are compared each other. The results could be qualitative understood from the presence of an inclined column with shape birefringence.

Citation Download Citation

Jianguo Wang, Jianda Shao, Shuhai Fan, and Zhengxiu Fan "Anisotropic optical properties of ZrO₂ films by oblique deposition", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607372

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KEYWORDS

Transmittance

Refractive index

Thin films

Optical properties

Polarization

Birefringence

Zirconium dioxide

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