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Proceedings Article

Design of infrared wavelength-selective microbolometers using planar multimode detectors

[+] Author Affiliations
Sang-Wook Han, Dean P. Neikirk

The Univ. of Texas at Austin (USA)

Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, 549 (July 1, 2005); doi:10.1117/12.608698
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From Conference Volume 5836

  • Smart Sensors, Actuators, and MEMS II
  • Carles Cane; Jung-Chih Chiao; Fernando Vidal Verdu
  • Sevilla, Spain | May 09, 2005

abstract

Multimode microbolometers for wavelength-selective infrared detection have been designed using a Genetic Algorithm and an electromagnetic model of the planar antenna. Wavelength selectivity can be varied by changing the distance to a tuning mirror, or by changing only lithographically drawn parameters, with bandwidth narrower than Fabry-Perot microbolometers. The design of a three color system covering the 7-14 micron band is presented.

© (2005) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Sang-Wook Han and Dean P. Neikirk
"Design of infrared wavelength-selective microbolometers using planar multimode detectors", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, 549 (July 1, 2005); doi:10.1117/12.608698; http://dx.doi.org/10.1117/12.608698


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