Reactive magnetron sputtering of antinomy tin oxide films on glass substrate

Chien-Cheng Liu; Wei-Chi Huang; Fei-Lung Lu; Chien-Tang Wang

doi:10.1117/12.621512

12 April 2005 Reactive magnetron sputtering of antinomy tin oxide films on glass substrate

Chien-Cheng Liu, Wei-Chi Huang, Fei-Lung Lu, Chien-Tang Wang

Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621512
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore

Abstract

Antinomy tin oxide (ATO) films have been widely used as a transparent conducting thin film material for application in various fields such as solar cells, opto-electronic devices, and liquid crystal displays. It has a high carrier concentration, low electrical resistivity and high transmission in the visible light range. ATO films were deposited on corning glass 1737F by low temperature reactive magnetron sputtering. The structural and surface properties of the films were determined with scanning electron microscopy, transmission electron microscopy, X-ray diffraction and atomic force microscopy. The effects of annealing temperature and atmosphere on the composition, microstructure, surface morphology, conductivity and optical properties of ATO films were investigated.

Citation Download Citation

Chien-Cheng Liu, Wei-Chi Huang, Fei-Lung Lu, and Chien-Tang Wang "Reactive magnetron sputtering of antinomy tin oxide films on glass substrate", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); https://doi.org/10.1117/12.621512

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available